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Drawing apparatus, and method of manufacturing article

机译:绘图装置及制品的制造方法

摘要

The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, the apparatus including a controller configured to perform control of the drawing performed by movement of a stage and a blanking function of each of a plurality of charged particle optical systems, wherein the controller is configured to perform, with respect to a first charged particle optical system, of the plurality of charged particle optical systems, from a plurality of charged particle beams reach a first region and a second region, formed on the substrate and adjacent to each other, the control such that the drawing is performed only in one of the first and second regions with a first portion of charged particle beams of the plurality of charged particle beams with the stage moved in a second direction.
机译:本发明提供了一种用于在具有带电粒子束的基板上进行制图的制图装置,该装置包括控制器,该控制器被配置为通过载物台的移动和多个带电粒子光学装置的每一个的消隐功能来执行对制图的控制。系统,其中,控制器被配置为相对于第一带电粒子光学系统执行多个带电粒子光学系统中的多个带电粒子束到达形成在基板上的第一区域和第二区域,并且彼此相邻地进行控制,使得仅在第一区域和第二区域中的一个区域中进行绘制,并且使多个带电粒子束中的带电粒子束的第一部分沿第二方向移动。

著录项

  • 公开/公告号US9293292B2

    专利类型

  • 公开/公告日2016-03-22

    原文格式PDF

  • 申请/专利权人 CANON KABUSHIKI KAISHA;

    申请/专利号US201414228415

  • 发明设计人 YOSHIHIRO HIRATA;MASATO MURAKI;

    申请日2014-03-28

  • 分类号H01J37/04;H01J37/317;H01J37/20;

  • 国家 US

  • 入库时间 2022-08-21 14:30:09

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