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Probe resistance measurement method and semiconductor device with pads for probe resistance measurement
Probe resistance measurement method and semiconductor device with pads for probe resistance measurement
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机译:探针电阻的测定方法及带探针电阻的焊盘的半导体装置
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摘要
A probe resistance measuring method includes measuring first resistances at three or more nodes by making contact at least a part of a plurality of probes of a probe unit with three or more pads for resistance measurement based on a first correspondence relation. The measured resistances are stored as a first measurement result and contact resistances of the plurality of probes of the probe unit are calculated based on the first measurement result.
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