Electron Temperature Measurement by Floating Probe Method Using AC Voltage

摘要

This study presents a novel floating probe method to measure electron temperatures using a hollow cathode-type discharge tube. The proposed method detects a shift in the floating potential when an AC voltage is applied to a probe through an intermediary blocking capacitor.The shift in the floating potential is described as a function of the electron temperature and the applied AC voltage. The floating probe method is simpler than the Langmuir probe method because it does not require the measurement of volt-ampere characteristics. As the input AC voltage increases, the electron temperature converges. The electron temperature measured using the floating probe method with an applied sinusoidal voltage shows a value close to the first(tail)electron temperature in the range of the floating potential.