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Piezoelectric film producing process, vibrator element, vibrator, oscillator, electronic device, and moving object
Piezoelectric film producing process, vibrator element, vibrator, oscillator, electronic device, and moving object
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机译：压电膜的制造方法，振子，振子，振荡器，电子设备以及移动体
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摘要
A vibrator element includes: a base portion; and a vibrating arm extending from the base portion, the vibrating arm including a piezoelectric film that contains Cu at a crystal grain boundary.
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