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Low-cost CMOS structure with dual gate dielectrics and method of forming the CMOS structure

机译:具有双栅极电介质的低成本CMOS结构及其形成方法

摘要

Impurity atoms of a first type are implanted through a gate and a thin gate dielectric into a channel region that has substantially only the first type of impurity atoms at a middle point of the channel region to increase the average dopant concentration of the first type of impurity atoms in the channel region to adjust the threshold voltage of a transistor.
机译:通过栅极和薄栅极电介质将第一类型的杂质原子注入到在沟道区域的中点处基本上仅具有第一类型杂质原子的沟道区域中,以增加第一类型杂质的平均掺杂剂浓度。沟道区域中的原子调节晶体管的阈值电压。

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