POSITIVE PHOTOSENSITIVE RESIN COMPOSITION FOR SPRAY COATING AND METHOD FOR PRODUCING THROUGH ELECTRODE USING THE SAME

摘要

THE PRESENT INVENTION PROVIDES A POSITIVE PHOTOSENSITIVE RESIN COMPOSITION FOR SPRAY COATING, WHICH COMPRISES AN ALKALI-SOLUBLE RESIN, A COMPOUND WHICH GENERATES AN ACID WHEN EXPOSED TO LIGHT AND A SOLVENT, AND WHICH HAS A VISCOSITY OF 0.5 TO 200 CP. BY USING THE POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, IT IS POSSIBLE TO FORM A COATING FILM (6) HAVING A UNIFORM THICKNESS ON THE INNER SURFACE OF A HOLE (5) HAVING A HIGH ASPECT RATIO. BY USING A COATING FILM PATTERN (7), WHICH IS OBTAINED BY EXPOSING AND DEVELOPING A PREDETERMINED REGION OF THE OBTAINED COATING FILM (6), AS AN INSULATING FILM (13) OR MASK FOR FORMING AN INSULATING FILM PATTERN (14), IT IS POSSIBLE TO SUPPRESS GENERATION OF LEAKAGE CURRENT IN A HOLE (5) AND TO FORM A THROUGH ELECTRODE WITH A HIGH YIELD. (FIGURE 1)