GROWTH OF AL2O3 THIN FILMS FROM TRIALKYLLALUMINUM FOR PHOTOVOLTAIC APPLICATIONS

摘要

A composition comprising, for 100% of its total mass, at least 97% of a Trialkylaluminium and: - From 200 ppb to 5 ppm of Mo (Molybdenum); - From 1000 ppb to 5 ppm of Fe (Iron); - From 200 ppb to 5 ppm of Cu (Copper); - From 200 ppb to 10 ppm of Ta (Tantalum).