GROWTH OF AL2O3 THIN FILMS FOR PHOTOVOLTAIC APPLICATIONS

摘要

A COMPOSITION COMPRISING, FOR 100% OF ITS TOTAL MASS, AT LEAST 97% OF AN ALUMINIUM PRECURSOR OF FORMULA: AL(R1)2(OR2) WITH R1 AND R2 INDEPENDENTLY SELECTED IN THE GROUP CONSISTING OF METHYL, ETHYL, PROPYL, ISOPROPYL AND T-BUTYL; AND: - FROM 200 PPB TO 5 PPM OF MO (MOLYBDENUM); - FROM 1000 PPB TO 5 PPM OF FE (IRON); - FROM 200 PPB TO 5 PPM OF CU (COPPER); - FROM 200 PPB TO 5 PPM OF TA (TANTALUM).