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SEMICONDUCTOR DEVICE AND METHOD OF FORMING SUPPORTING LAYER OVERSEMICONDUCTOR DIE IN THIN FAN-OUTWAFER LEVEL CHIP SCALE PACKAGE

机译:薄型风机外罩水平芯片规模封装中的半导体装置和形成支撑层外导体模具的方法

摘要

A semiconductor device includes a semiconductor die. An encapsulant is formed around the semiconductor die. A build-up interconnect structure is formed over a first surface of the semiconductor die and encapsulant. A first supporting layer is formed over a second surface of the semiconductor die as a supporting substrate or silicon wafer disposed opposite the build-up interconnect structure. A second supporting layer is formed over the first supporting layer an includes a fiber enhanced polymer composite material comprising a footprint including an area greater than or equal to an area of a footprint of the semiconductor die. The semiconductor die comprises a thickness less than 450 micrometers (m). The thickness of the semiconductor die is at least 1 m less than a difference between a total thickness of the semiconductor device and a thickness of the build-up interconnect structure and the second supporting layer.
机译:半导体器件包括半导体管芯。在半导体管芯周围形成密封剂。在半导体管芯和密封剂的第一表面上方形成堆积互连结构。第一支撑层形成在半导体管芯的第二表面上方,作为与堆积互连结构相对设置的支撑衬底或硅晶片。在第一支撑层上形成第二支撑层,该第二支撑层包括纤维增强的聚合物复合材料,该纤维增强的聚合物复合材料具有覆盖区,该覆盖区的面积大于或等于半导体管芯的覆盖区的面积。半导体管芯的厚度小于450微米(m)。半导体管芯的厚度比半导体器件的总厚度与堆积互连结构和第二支撑层的厚度之间的差小至少1m。

著录项

  • 公开/公告号SG10201602273QA

    专利类型

  • 公开/公告日2016-05-30

    原文格式PDF

  • 申请/专利权人 STATS CHIPPAC LTD;

    申请/专利号SG10201602273Q

  • 发明设计人 LIN YAOJIAN;CHEN KANG;GU YU;

    申请日2013-08-06

  • 分类号

  • 国家 SG

  • 入库时间 2022-08-21 14:22:44

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