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SCREEN PRINTING SYSTEMS AND TECHNIQUES FOR CREATING THIN-FILM TRANSISTORS USING SEPARATED CARBON NANOTUBES

机译:使用分离的碳纳米管制备薄膜晶体管的屏幕印刷系统和技术

摘要

A method of fabricating a thin film transistor, the method includes applying a first ink containing metallic particles to a first screen mask, and using the first screen mask to deposit the first ink to form a source electrode and a drain electrode on a substrate bearing a layer of carbon nanotubes (CNT). The method includes applying a second ink containing a dielectric material to a second screen mask, and using the second screen mask to deposit the second ink to form a layer of the dielectric material on the layer of CNT between the source electrode and the drain electrode. The method includes applying a third ink containing metallic particles to a third screen mask, and using the third screen mask to deposit the first ink to form a metallic gate electrode on the layer of the dielectric material to form the thin film transistor.
机译:一种制造薄膜晶体管的方法,该方法包括将包含金属颗粒的第一墨施加到第一屏幕掩模上,并且使用第一屏幕掩模沉积第一墨以在承载有硅的衬底上形成源电极和漏电极。碳纳米管(CNT)层。该方法包括将包含介电材料的第二墨水施加到第二丝网掩模,以及使用第二丝网掩模沉积第二墨水以在源电极和漏电极之间的CNT层上形成介电材料层。该方法包括将包含金属颗粒的第三墨施加到第三屏幕掩模,以及使用第三屏幕掩模沉积第一墨以在电介质材料层上形成金属栅电极以形成薄膜晶体管。

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