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SCREEN PRINTING SYSTEMS AND TECHNIQUES FOR CREATING THIN-FILM TRANSISTORS USING SEPARATED CARBON NANOTUBES
SCREEN PRINTING SYSTEMS AND TECHNIQUES FOR CREATING THIN-FILM TRANSISTORS USING SEPARATED CARBON NANOTUBES
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机译:使用分离的碳纳米管制备薄膜晶体管的屏幕印刷系统和技术
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摘要
A method of fabricating a thin film transistor, the method includes applying a first ink containing metallic particles to a first screen mask, and using the first screen mask to deposit the first ink to form a source electrode and a drain electrode on a substrate bearing a layer of carbon nanotubes (CNT). The method includes applying a second ink containing a dielectric material to a second screen mask, and using the second screen mask to deposit the second ink to form a layer of the dielectric material on the layer of CNT between the source electrode and the drain electrode. The method includes applying a third ink containing metallic particles to a third screen mask, and using the third screen mask to deposit the first ink to form a metallic gate electrode on the layer of the dielectric material to form the thin film transistor.
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