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HEATER FOR GROWING MONOCRYSTALS, MONOCRYSTAL GROWTH DEVICE USING SAME, AND GROWTH METHOD

机译:用于生长单晶的加热器,使用其的单晶生长装置以及生长方法

摘要

The present invention relates to a heater for melting a raw material in order to grow monocrystals, a monocrystal growth device for growing monocrystals about seed crystals from the molten raw material, and a growth method. The heater for growing monocrystals has a plurality of heater units provided on a side portion around a crucible and separated into two or more stages in the vertical direction. This guarantees stable control while maintaining large temperature gradients on the upper and lower portions of the crucible, thereby growing large-gauge monocrystals, and each of the plurality of heater units comprise a heating body, which has a different width and a different thickness depending on the position, thereby increasing the temperature gradient in the vertical/horizontal direction.
机译:本发明涉及用于使原料熔融以使单晶生长的加热器,用于使单晶围绕熔融的晶种生长的单晶生长装置以及生长方法。用于生长单晶的加热器具有多个加热器单元,该加热器单元设置在坩埚周围的侧部上,并且在垂直方向上分成两级或更多级。这保证了稳定的控制,同时在坩埚的上部和下部保持较大的温度梯度,从而生长了大规格的单晶,并且多个加热器单元中的每一个都包括加热体,该加热体具有不同的宽度和不同的厚度,具体取决于位置,从而增加了垂直/水平方向的温度梯度。

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