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HEATER FOR GROWING MONOCRYSTALS, MONOCRYSTAL GROWTH DEVICE USING SAME, AND GROWTH METHOD
HEATER FOR GROWING MONOCRYSTALS, MONOCRYSTAL GROWTH DEVICE USING SAME, AND GROWTH METHOD
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机译:用于生长单晶的加热器,使用其的单晶生长装置以及生长方法
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摘要
The present invention relates to a heater for melting a raw material in order to grow monocrystals, a monocrystal growth device for growing monocrystals about seed crystals from the molten raw material, and a growth method. The heater for growing monocrystals has a plurality of heater units provided on a side portion around a crucible and separated into two or more stages in the vertical direction. This guarantees stable control while maintaining large temperature gradients on the upper and lower portions of the crucible, thereby growing large-gauge monocrystals, and each of the plurality of heater units comprise a heating body, which has a different width and a different thickness depending on the position, thereby increasing the temperature gradient in the vertical/horizontal direction.
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