DEFECT INSPECTION SYSTEM BASED ON ANALYSIS OF IMAGE AND METHOD THEREOF

摘要

Defect inspecting system is provided and is based on image analysis. Embodiment according to the invention, the defect inspecting system based on image analysis include: a kind of one or more features value of computing unit, and by analyzing each each feature for checking target area, to specify these, at least one checks target area; Selecting unit selection defect detecting method can apply to each detection target area and specify be stored in advance in these multiple defect inspection methods; And unit is provided, at least one the target area defect detecting method selected in list is provided and checks which is designated. Selecting unit selection defect detecting method can be applied at least one and check target area to specify these to specify each defect detecting method of these application condition profiles by comparing and calculate thematic value. The selected defect inspection header list of the method for each title defects detection includes the defect of defect. ;The 2016 of copyright KIPO submissions