Method for fabricating fluorine-doped tin oxide film with high transmittance

摘要

Disclosed is a fluorine-doped high-transmittance tin oxide thin film manufacturing method. A method of manufacturing a fluorine-doped tin oxide thin film according to an embodiment of the present invention includes the steps of depositing a thin film of tin oxide on a substrate using any one of SnCl ₄ .5H ₂ O, SnCl _2, and SnCl ₂ .2H ₂ O and NH ₄ F, HF and acetyl fluoride Preparing a precursor solution having a molar ratio of F / Sn of 0.4 to 1.4 by mixing any one of the solvents with a solvent; And forming a fluorine-doped tin oxide thin film (FTO) on the substrate by spraying the prepared precursor solution onto a substrate, wherein the step of preparing the precursor solution comprises adding 5-20 % Ethanol, it is possible to increase the transmittance in the ultraviolet region and the infrared region as well as in the visible light region and improve the haze.