ARMATURE COIL FOR ELECTROMAGNETIC ACTUATOR ELECTROMAGNETIC ACTUATOR EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

X-axis configuration for the stator, and the armature coil 60 generating a magnetic field by energization of the linear motor is formed by copper, wound in a predetermined winding axis Jean-shaped band on the conductive layer (62a) and the conductive layer the conductive layer (62a) insulating layer (62b) on the strip that is electrically isolated to each other between the opposite surface are formed between the face portion, that of (62a) and, between the opposite surface of the conductive layer (62a) the provided with an adhesive layer (62c) via an insulating bonding layer (62b). ;