MANUFACTURING METHOD OF NICKEL-PLATINUM ALLOY POWDER FOR SPUTTERING TARGET AND NICKEL-PLATINUM ALLOY POWDER FOR SPUTTERING TARGET MANUFACTURED THEREBY

摘要

The present invention relates to a manufacturing method of nickel-platinum alloy powder for a sputtering target, and nickel-platinum alloy powder for a sputtering target manufactured thereby. The manufacturing method of nickel-platinum alloy powder for a sputtering target comprises: a step of guiding and fusing nickel (Ni) and platinum (Pt) to form a nickel-platinum alloy (a); a step of fusing and vaporizing a nickel-platinum alloy ingot using transportable arc plasma (b); a step of rapidly cooling the vaporized nickel-platinum alloy to form nickel-platinum alloy powder (c); and a step of collecting the nickel-platinum alloy (Ni-Pt) powder (d).;COPYRIGHT KIPO 2016