Al-doped ZnO nanostructured powders by emulsion detonation synthesis - Improving materials for high quality sputtering targets manufacturing

摘要

Emulsion detonation synthesis method was used to produce undoped and Al-doped ZnO nanostructured powders (0.5-2.0 wt.% Al_2O_3). The synthesized powders present a controlled composition and a morphology which is independent on the doping level. The XRD results indicate wurtzite as the single phase for undoped ZnO and the presence of gahnite as secondary phase for Al-doped ZnO powders. The sintering behavior of each powder was studied based on their linear shrinkage and shrinkage rate curves, showing the high sinterability of the powders. Activation energies for densificalion in the earlier stage were calculated for all compositions and possible sintering mechanisms are suggested depending on the doping level. The high chemical homogeneity and sinterability and the lower electrical resistivity of the bulk Al-doped sintered samples demonstrates the feasibility of emulsion detonation synthesis for the production of high quality Al-doped ZnO powders to be used in ceramic sputtering targets manufacture.