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Development of Fe-Si-Al Alloy Sputtering Target through Powder Metallurgy Process.

机译：粉末冶金工艺开发Fe-Si-Al合金溅射靶。

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A. Yanagitani; M. Murakami; K. Yanagimoto; Y. Tanaka;
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年度 1991
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机译：粉末冶金法烧结Al-Cr合金靶及其溅射过程中颗粒生成行为的研究
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机译：粉末冶金法烧结Al-Cr合金靶及其溅射过程中颗粒生成行为的研究
3. Microstructural and tribological properties of sputtered AlCrSiWN films deposited with segmented powder metallurgic target materials [J] . Tillmann Wolfgang, Fehr Alexander, Stangier Dominic Thin Solid Films . 2019,第OCTa1期

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Development of Fe-Si-Al Alloy Sputtering Target through Powder Metallurgy Process.

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