THIN FILM DEPOSITION APPARATUS, AND DEPOSITION MATERIAL TRANSFERRING MODULE THEREFOR

摘要

The present invention relates to a kind of film deposition apparatus, transmit deposition substance more particularly, to a kind of deposition substance transfer chamber transfer chamber with solid-state evaporation source, having for film deposition apparatus is identical, and wherein deposition substance steadily supplies the substance of not form of tubes and type. Subject description discloses a kind of film deposition apparatus, comprising: forms the processing space of sealing in the process chamber; It is mounted at least one evaporation source evaporation deposition substance of process chamber; At least one deposition substance feedway is installed in the process chamber, and is formed with the filling of deposition substance holding part wherein deposition substance grain shape; At least one deposition substance transfer chamber transfer chamber is mounted on process chamber and conveys deposition substance from above-mentioned deposition substance power supply unit to evaporation source. The film deposition apparatus of the deposition substance transfer chamber transfer chamber includes: that opening unit passes through top and bottom; Shutter unit closes opening portion, and in cylinder unit to keep a state, deposition substance is filled in cylinder unit, or opens the opening portion and fall deposition substance to evaporation source; Cylinder transfer unit comes from deposition substance supply unit and a position for deposition substance supply between the position of transfer unit, and deposition substance is transferred to evaporation source in the position; Shutter transmission unit, for driving mobile flashboard unit to make shutter unit to open and close opening portion, in cylinder unit; The auxiliary for declining auxiliary device with a kind of deposition substance falls off in deposition substance unit, when shutter unit opens bottomed cylinder device. ;The 2016 of copyright KIPO submissions