METHOD FOR MANUFACTURING ULTRA FINE 3D MICRO ROBOT USING LASER-STRUCTURED POLYMER MOLD

摘要

The invention discloses a kind of use non-polymer materials for manufacturing ultra-fine three-dimensional micro robot. One embodiment according to the invention, this method manufacture hyperfine three-dimensional micro robot using laser-structured polymeric molds comprising: step (1) prepare a mold come manufacture with fine structure use three-dimensional laser lithography technique system; The non-polymer material of b step is injected into mold, using one or more from electro-plating method and dipping method. Therefore, invention increases the intensity of management utilization to pass through the magnetic metallurgy of the use for forming three-dimensional micro robot;The 2016 of copyright KIPO submissions