METHOD FOR MANUFACTURING ULTRA FINE 3D MICRO ROBOT USING LASER-STRUCTURED POLYMER MOLD

摘要

A method for fabricating an ultrafine three-dimensional microrobot using a non-polymer material is disclosed. According to an aspect of the present invention, there is provided a method for manufacturing an ultrafine three-dimensional microrobot using a laser processing polymer mold, comprising the steps of: (a) preparing a mold to include a microstructure manufactured using a three-dimensional laser lithography system; and (b) injecting a non-polymeric material into the mold using at least one of a plating method and an immersion method.