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METHOD OF DETERMINING AN AMOUNT OF IMPURITIES THAT A CONTAMINATING MATERIAL CONTRIBUTES TO HIGH PURITY SILICON AND FURNACE FOR TREATING HIGH PURITY SILICON

机译:测定污染物质对高纯硅和高纯硅处理的杂质量的方法

摘要

The present invention relates to a method for determining the amount of impurities that a contaminant provides to high purity silicon, including at least partially wrapping a sample of said high purity silicon in a contaminant. The sample enclosed in the contaminant is heated in the furnace. The variation of the impurity content of the high purity silicon is determined after the heating step as compared with the impurity content of the high purity silicon before the heating step. The furnace for heat treating the high purity silicon includes a housing defining a heating chamber. The housing is made at least in part from low contaminants that provide less than 400 parts per hundred impurities per ply of high purity silicon during heating at the annealing temperature for a sufficient time to anneal the high purity silicon, Less than 400 parts of impurities.;
机译:本发明涉及一种确定污染物提供给高纯度硅的杂质量的方法,该方法包括至少部分地将所述高纯度硅样品包裹在污染物中。包含在污染物中的样品在炉中加热。与加热步骤之前的高纯度硅的杂质含量相比,确定了加热步骤之后的高纯度硅的杂质含量的变化。用于热处理高纯度硅的熔炉包括限定加热室的壳体。该壳体至少部分地由低污染物制成,该低污染物在退火温度下加热足够的时间以退火高纯度硅时,每层高纯度硅每层提供少于400份的杂质,少于400份杂质。 ;

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