Volatile dihydropyrazinyl and dihydropyrazine metal complexes

摘要

The present invention relates to a composition comprising a dihydropyrazinyl anion capable of coordinating with a wide variety of metals as six electron ligands to yield volatile metal complexes for ALD and CVD deposition. It also relates to a non-deprotonated dihydropyrazine which can be coordinated to the metal as a stabilizing neutral ligand. In one embodiment, the composition is used for direct liquid injection delivery of a metal dihydropyrazine complex precursor to an ALD or CVD fixed chamber for deposition of a metal-containing thin film, such as, for example, a ruthenium or cobalt metal film.