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A method for the production of a substrate for at least one power semiconductor component, a method for the production of a power semiconductor module and power semiconductor module

机译:一种用于制造至少一个功率半导体组件的基板的方法,一种用于制造功率半导体模块的方法以及一种功率半导体模块

摘要

A method for the production of a substrate (7, 7 ‘, 7 ‘ ‘) for at least one power semiconductor component (10a, 10b) with the following process steps:a) providing an electrically nonconductive insulating material body (1),b) applying a structured first metal layer (2a) on the first side (15a) of the insulating material body (1) and applying a second metallization layer (2b) on one of the first side (15a) of the insulating material body (1), which are arranged lying opposite the second side (16b) of the insulating material body (1),c) applying a not electrically conductive lacquer layer (3) on the second metallization layer (2b), wherein the lacquer layer (3) has recesses (13),d) a galvanic deposition of a first metal layer (5) on the first metallization layer (2a), together with a galvanic deposition of elevations (6, 6 ‘) on the second metallization layer (2b) at the locations at which the lacquer layer (3) has recesses (13).
机译:一种用于制造至少一个功率半导体组件(10a,10b)的基板(7,7',7'')的方法,其具有以下工艺步骤:a)提供非导电绝缘材料主体(1),b )在绝缘材料主体(1)的第一侧(15a)上施加结构化的第一金属层(2a),并在绝缘材料主体(1)的第一侧(15a)的其中一个上施加第二金属化层(2b) )布置成与绝缘材料本体(1)的第二侧(16b)相对,c)在第二金属化层(2b)上施加不导电的漆层(3),其中,漆层(3)具有凹口(13),d)在第一金属化层(2a)上的第一金属层(5)的电沉积,以及在第二金属化层(2b)上的凸起(6、6')的电沉积。漆层(3)具有凹槽(13)的位置。

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