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Controlled silicon rectifiers, manufacturing processes and development structures

机译:可控硅整流器,制造工艺和开发结构

摘要

A method, comprising: forming a common P-well (12) on a buried insulator layer (28b) of a silicon-on-insulator wafer (28) in an upper silicon thin-film of the silicon-on-insulator wafer (28c); and forming a plurality of controlled silicon rectifiers (10) in the common P-well such that N + diffusion cathodes (20) of each of the plurality of controlled silicon rectifiers are coupled together through the common P-well, forming the A plurality of the controlled silicon rectifiers includes forming N-wells (14) surrounded by the common P-well in the upper silicon thin film such that a corresponding pair of the respective N + diffusion cathodes are on opposite sides of each N-well wherein each N-well has a plurality of P + diffusion anodes (16) of each N-well and an N-well contact (18) of each N-well, forming P-well contacts (22) in the common one P-well; and forming a P + diffusion structure (26) in the common P-well, the P + diffusion structure connecting each of the P-well contacts, the P + diffusion structure each N-well and the corresponding pair of N + diffusion cathodes to the opposite Sides of each N-tub surrounds.
机译:一种方法,包括:在绝缘体上硅晶片(28c)的上硅薄膜中的绝缘体上硅晶片(28)的掩埋绝缘体层(28b)上形成公共P阱(12)。 );在公共P阱中形成多个可控硅整流器(10),使得多个可控硅整流器中的每个的N +扩散阴极(20)通过公共P阱耦合在一起,形成多个受控硅整流器包括在上硅薄膜中形成被公共P阱围绕的N阱(14),以使相应的一对相应的N +扩散阴极位于每个N阱的相对侧,其中每个N-阱具有每个N阱的多个P +扩散阳极(16)和每个N阱的N阱触点(18),在公共的一个P阱中形成P阱触点(22)。并在公共P阱中形成P +扩散结构(26),该P +扩散结构连接每个P阱接触点,每个N阱的P +扩散结构以及相应的一对N +扩散阴极,每个N形管的相对两侧。

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