Vacuum chamber, a method for operating a vacuum chamber and method for operating a vacuum plant 318,892 ethyl 1-cyclopropyl-7-fluoro-8-trifluoromethyl-1,4-dihydro-4-oxo-3-quinolinecarboxylate

摘要

According to various embodiments may be a vacuum chamber (100) at least comprises: at least one first region (% si heritage 101p) and at least one second region (% si heritage 103p) for processing a substrate (220) in the vacuum chamber (100); a transport device for transporting the substrate (220) to be processed by at least the first region (% si heritage 101p) in the second region (% si heritage 103p); a between the first region (% si heritage 101p) and the second region (% si heritage 103p) of the parabolic channel arranged position structure (104), wherein the lane position of the parabolic reflector structure (104) a gutter para position gap (104g) between the lane position of the parabolic reflector structure (104) and the transported by means of the transport device to be processed substrate (220) forms in such a way that a propagation of gas particles of one of the two% si rich heritage (101p, 103p) by means of the gutter para position gap (104g) into the other of the two% si rich heritage (101p, 103p) is inhibited; and a between the first region (% si heritage 101p) and the second region (% si heritage 103p), which are arranged in a gas supply (104z) for introducing an inert gas (114) in the lane position gap (104g of the parabolic reflector.).