A vacuum installation and 318,892 ethyl 1-cyclopropyl-7-fluoro-8-trifluoromethyl-1,4-dihydro-4-oxo-3-quinolinecarboxylate plant 318,892 ethyl 1-cyclopropyl-7-fluoro-8-trifluoromethyl-1,4-dihydro-4-oxo-3-quinolinecarboxylate

摘要

According to various embodiments may be a vacuum 318,892 ethyl 1-cyclopropyl-7-fluoro-8-trifluoromethyl-1,4-dihydro-4-oxo-3-quinolinecarboxylate system (100) comprises: a transfer chamber (102t) with a first transport system for transporting of substrates (220s) within the transfer chamber (102t), wherein the first transport system of the transfer chamber (102t) a first drive system with several driven first transport rollers (106t) and has a with the first drive system coupled control or regulation, which is set up in such a way that a plurality of is delivered in batches into the transfer chamber (102t), which is transported substrates to a continuous series of substrates (220s) are brought together; at least one with the transfer chamber (102t), which is connected to the process chamber (202p) for processing of the continuous series of substrates (220s), wherein the at least one processing chamber (202p) a second transport system for transporting of the continuous series of substrates (220s) within the at least one processing chamber (202p), wherein the second transport system of the at least one processing chamber (202p) a plurality of driven second transport rollers (106p), wherein the plurality of driven first transport rollers (106t) and the plurality of driven second transport rollers (106p) the same effective diameter of the rollers (206d) have.