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METHOD AND DEVICE FOR PROTECTING A SWITCH, SUCH AS A MEMS SWITCH. AND MEMS SWITCH WITH SUCH A PROTECTIVE DEVICE
METHOD AND DEVICE FOR PROTECTING A SWITCH, SUCH AS A MEMS SWITCH. AND MEMS SWITCH WITH SUCH A PROTECTIVE DEVICE
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机译:用于保护开关的方法和装置,例如MEMS开关。和带有保护装置的MEMS开关
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摘要
A method and apparatus for protecting a MEMS switch is provided. With the method and apparatus, the integrity of the MEMS switches is improved by reducing their susceptibility to current flowing through them during switching of the MEMS switch and vice versa. The protection circuit provides a parallel path, known as a shunt, around the MEMS component. However, components within the shunt circuit can themselves be removed from the shunt when they are not needed. This improves the electrical performance of the shunt assuming that the switch is in an off state.
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