The present invention relates to a method and a device for the locally defined machining of surfaces of workpieces. In this case, a of a laser radiation source (2) emitted laser beam (1) on the reflecting surfaces of a plurality of individually controllable with an electronic control system, in order to at least one axis pivotable, are disposed next to one another and directed micromirrors. From the reflecting surfaces of the each in a defined pivoted micromirrors reflected partial beams (4) take on the focused in the focal plane (6) of the focusing optical system (5) arranged at different surface of a workpiece, adjustable positions, so that in a region near the surface of the workpiece at the same time a locally defined change of the workpiece material and / or a locally defined material erosion process is achieved with a preset geometry. In the case that a plurality of partial beams (4) in common on the same position in the focal plane (6) of the focusing optical system (5), are superimposed on the component beams (4) an incoherent.
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