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Method of treatment with an ion beam of a gas, mono- and multicharge to produce materials made of sapphire synthetic antireflection
Method of treatment with an ion beam of a gas, mono- and multicharge to produce materials made of sapphire synthetic antireflection
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机译:用气体,单电荷和多电荷的离子束处理以生产由蓝宝石合成抗反射材料制成的方法
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摘要
Method of treatment with an ion beam of a gas, mono- and multicharged produced by a source to electron cyclotron resonance (ecr) of a material, synthetic sapphire, where - the acceleration voltage of the ions comprised between 5 kv and 1000 kv is chosen to create an implanted layer of a thickness equal to a multiple of 100 nm; - one chooses the quantity of ions per unit surface area in a range comprised between 1012 ions / cm2 and 1018 ions / cm2, so as to create an atomic concentration of ions equal to 10% with an uncertainty of (+ / -) 5%. It is thus obtained, advantageously of the materials, synthetic sapphire an antireflection coating in the visible range.
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