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Method of treatment with an ion beam of a gas, mono- and multicharge to produce materials made of sapphire synthetic antireflection

机译:用气体,单电荷和多电荷的离子束处理以生产由蓝宝石合成抗反射材料制成的方法

摘要

Method of treatment with an ion beam of a gas, mono- and multicharged produced by a source to electron cyclotron resonance (ecr) of a material, synthetic sapphire, where - the acceleration voltage of the ions comprised between 5 kv and 1000 kv is chosen to create an implanted layer of a thickness equal to a multiple of 100 nm; - one chooses the quantity of ions per unit surface area in a range comprised between 1012 ions / cm2 and 1018 ions / cm2, so as to create an atomic concentration of ions equal to 10% with an uncertainty of (+ / -) 5%. It is thus obtained, advantageously of the materials, synthetic sapphire an antireflection coating in the visible range.
机译:气体离子束的处理方法,该方法由合成蓝宝石材料的电子回旋加速器共振(ecr)产生的单电荷和多电荷气体,其中-选择离子的加速电压在5 kv和1000 kv之间产生厚度等于100nm的倍数的注入层; -在1012离子/ cm2和1018离子/ cm2之间的范围内选择单位表面积的离子数量,以产生等于10%的离子原子浓度,不确定性为(+/-)5% 。因此,有利地,由该材料获得了合成蓝宝石在可见光范围内的抗反射涂层。

著录项

  • 公开/公告号FR3021332B1

    专利类型

  • 公开/公告日2016-07-01

    原文格式PDF

  • 申请/专利权人 QUERTECH;

    申请/专利号FR20140001172

  • 发明设计人 FREDERIC GUERNALEC;DENIS BUSARDO;

    申请日2014-05-23

  • 分类号C23C14/48;G02B1/12;

  • 国家 FR

  • 入库时间 2022-08-21 14:08:34

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