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DIAMOND UV SENSOR ELEMENT AND MANUFACTURING METHOD THEREOF, UV SENSOR DEVICE, DIAMOND SINGLE CRYSTAL PROCESSING METHOD
DIAMOND UV SENSOR ELEMENT AND MANUFACTURING METHOD THEREOF, UV SENSOR DEVICE, DIAMOND SINGLE CRYSTAL PROCESSING METHOD
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机译:金刚石紫外线传感器元件及其制造方法,紫外线传感器装置,金刚石单晶加工方法
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摘要
A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.
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