Diamond or Diamond Like Carbon Coated Chemical Sensors and a Method of MakingSame

摘要

The present invention relates to improved acoustic and optical wave chemicalsensor devices and to a method of forming the devices. In particular, the invention relates to coating the wave chemical sensors with a protective coating of diamond or a diamond like carbon (DLC) to improve device performance, durability and corrosion resistance when the device is in contact with a corrosive or a moist atmosphere or environment.