首页> 外国专利> ULTRASONIC BONDING TOOL, METHOD FOR MANUFACTURING ULTRASONIC BONDING TOOL, ULTRASONIC BONDING METHOD, AND ULTRASONIC BONDING APPARATUS

ULTRASONIC BONDING TOOL, METHOD FOR MANUFACTURING ULTRASONIC BONDING TOOL, ULTRASONIC BONDING METHOD, AND ULTRASONIC BONDING APPARATUS

机译:超声键合工具,制造超声键合工具的方法,超声键合方法和超声键合装置

摘要

An object of the present invention is to provide an ultrasonic bonding tool capable of bonding a lead wire, without any trouble, even to a surface of a thin-film base having a plate thickness of 2 mm or less such as a glass substrate. In the present invention, a surface portion of a chip portion (1c) of an ultrasonic bonding tool (1) used in an ultrasonic bonding apparatus has a plurality of planar portions (10) formed so as to be separated from one another, and a plurality of concavities (11) formed between the plurality of planar portions. Each of the plurality of planar portions (10) has a flatness of 2 µm or less.
机译:本发明的目的是提供一种超声波焊接工具,该超声波焊接工具能够毫无问题地将引线键合到玻璃基板等板厚为2mm以下的薄膜基材的表面。在本发明中,在超声波接合装置中使用的超声波接合工具(1)的芯片部分(1c)的表面部分具有形成为彼此分离的多个平面部分(10),并且在多个平面部之间形成有多个凹部(11)。多个平面部分(10)中的每一个具有2μm或更小的平坦度。

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