X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same

摘要

The X-ray tube (2) according to the present invention comprises a field emission type electron gun chamber (12), an electron beam aperture (40), an X-ray target (23) and a vacuum pump (27), in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section (11) is attachable and detachable to the electro magnetic lens section (28) in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electro magnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.