Optical deflector including meander-type piezoelectric actuators coupled by crossing bars therebetween

摘要

In an optical deflector including a mirror (1), a fixed frame (2) surrounding the mirror (1), and first and second piezoelectric actuators (3a, 3b) of a meander-type provided opposite to each other with respect to the mirror (1), for rocking the mirror (1) around an axis on a plane of the fixed frame (2), the first piezoelectric actuator (3a) includes a plurality of first piezoelectric cantilevers (3a-1, 3a-2, 3a-3, 3a-4) folded at first folded portions (Fa 12 , Fa 23 , Fa 34 ) and coupled to the fixed frame (2), and the second piezoelectric actuator (3b) includes a plurality of second piezoelectric cantilevers (3b-1, 3b-2, 3b-3, 3b-4) folded at second folded portions (Fb 12 , Fb 23 , Fb 34 ) and coupled to the fixed frame (2). The optical deflector further includes at least one first crossing bar (4) coupled between one of the first folded portions (Fa 12 , Fa 23 , Fa 34 ) and one of the second folded portions (Fb 12 , Fb 23 , Fb 34 ) symmetrically located with respect to the mirror (1).