首页> 外国专利> SYSTEM ZUR DURCHFÜHRUNG EINER BERÜHRUNGSLOSEN MESSUNG AN EINER PROBE UND PROBENTRÄGER

SYSTEM ZUR DURCHFÜHRUNG EINER BERÜHRUNGSLOSEN MESSUNG AN EINER PROBE UND PROBENTRÄGER

机译:对样品和样品载体进行无接触测量的系统

摘要

A sample carrier (14) is used for performing contactless measurement on a sample (12), on which sample carrier the heating tracks (20) on the substrate (15) form a parallel circuit between the first and the second heating terminal (16, 18), such that when a sample (12) placed on the sample carrier (14) is heated by application of a voltage between the first and the second heating terminal (16, 18) the heating properties of the sample carrier (14) are not impaired even if isolated breaks are present in the heating tracks (20) because of process variations in the production of the heating tracks (20) for instance. In one example of a sample carrier (14), the density of the heating tracks (20) increases from the centre of the substrate (15) area outwards. In this way, it is possible to avoid the otherwise frequently occurring inhomogeneities in the heating profile across the substrate (15), according to which the heating generally declines towards the edge of the substrate (15).
机译:样本载体(14)用于对样本(12)进行非接触式测量,在该样本载体上,基板(15)上的加热轨道(20)在第一和第二加热端子(16)之间形成并联电路, 18),使得当通过在第一和第二加热端子(16、18)之间施加电压来加热放置在样品载体(14)上的样品(12)时,样品载体(14)的加热特性为即使由于加热轨(20)的生产过程中的工艺变化,即使在加热轨(20)中存在孤立的断裂也不会损坏。在样品载体(14)的一个实例中,加热轨道(20)的密度从衬底(15)区域的中心向外增加。以此方式,可以避免在整个基板(15)上的加热轮廓中否则经常发生的不均匀性,据此,加热通常朝着基板(15)的边缘下降。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号