首页> 外国专利> SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD

SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD

机译:扫描电子显微镜的样品架,扫描电子显微镜的图像观察系统以及扫描电子显微镜的图像观察方法

摘要

A water solution (20) in which an observation sample (10) is, for example, dissolved is sandwiched on a first insulative thin film (203) side provided under a conductive thin film 201. When an electron beam incident part is charged minus, electric dipoles of water molecules are arrayed along a potential gradient. Electric charges are also generated on the surface of a second insulative thin film (204). The electric charges are detected by a terminal section (210) and changes to a measurement signal. In a state in which an electron beam (102) is blocked, the minus potential disappears. Consequently, the electric charges on the surface of the first insulative thin film (203) also disappear, and the measurement signal output from the terminal section (210) changes to 0.
机译:例如,溶解有观察样品(10)的水溶液(20)被夹在设置在导电薄膜201下方的第一绝缘薄膜(203)侧。当电子束入射部分带负电时,水分子的电偶极子沿电位梯度排列。在第二绝缘薄膜(204)的表面上也产生电荷。电荷由端子部(210)检测并变为测量信号。在电子束(102)被阻挡的状态下,负电位消失。因此,第一绝缘薄膜(203)的表面上的电荷也消失,并且从端子部(210)输出的测量信号变为0。

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