首页> 外国专利> SHAPE SIMULATION DEVICE, SHAPE SIMULATION METHOD, AND SHAPE SIMULATION PROGRAM

SHAPE SIMULATION DEVICE, SHAPE SIMULATION METHOD, AND SHAPE SIMULATION PROGRAM

机译:形状仿真设备,形状仿真方法和形状仿真程序

摘要

PROBLEM TO BE SOLVED: To provide a shape simulation device in which simplification of shape simulation and accuracy improvement can be compatible, and to provide a shape simulation method, and a shape simulation program.SOLUTION: A shape simulation device according to an embodiment includes a shape setting unit for setting the shape of a material in a calculation region at N times T-T(N is an integer of 2 or more). The device further includes a time evolution calculator performing time evolution of shape of the material independently at the times T-T, and calculating first through N-th values representing the change in shape of the material, respectively, from the time T-Tto the time T'-T'. The device further includes a shape calculator for calculating shape of the material at a time T, on the basis of the first through N-th values.SELECTED DRAWING: Figure 1
机译:解决的问题:提供一种形状仿真设备,其中可以兼容形状仿真的简化和精度提高,并且提供形状仿真方法和形状仿真程序。解决方案:根据实施例的形状仿真设备包括:形状设定单元,用于将计算区域中的材料的形状设定为N倍TT(N为2以上的整数)。该设备还包括时间演化计算器,该时间演化计算器在时间TT处独立执行材料形状的时间演化,并分别计算代表材料形状从时间T-T到时间T的第一至第N个值'-T'。该设备还包括一个形状计算器,用于根据第一到第N个值在时间T处计算材料的形状。

著录项

  • 公开/公告号JP2017163035A

    专利类型

  • 公开/公告日2017-09-14

    原文格式PDF

  • 申请/专利权人 TOSHIBA MEMORY CORP;

    申请/专利号JP20160047310

  • 发明设计人 ICHIKAWA HISASHI;

    申请日2016-03-10

  • 分类号H01L21;H01L21/3065;G03F7/20;G03F1/36;H01L21/205;

  • 国家 JP

  • 入库时间 2022-08-21 14:01:53

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号