POLYCRYSTAL CERAMIC SUBSTRATE, POLYCRYSTAL CERAMIC SUBSTRATE WITH JOINT LAYER AND LAMINATE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a polycrystal ceramic substrate suitable as a ground substrate of a laminate substrate capable of suppressing reduction of manufacturing efficiency of a semiconductor device due to deterioration of a joint state, a polycrystal ceramic substrate with a joint layer containing the polycrystal ceramic substrate and a laminate substrate.SOLUTION: There is provided a polycrystal ceramic substrate 10 jointed to a compound semiconductor substrate 30 via a joint layer 20, and satisfying at least one of Relational expression (1) 0.7α/α0.9 (1) and Relational expression (2) 0.7α/α0.9 (2), where αis linear expansion coefficient of the polycrystal ceramic substrate 10 and αis linear expansion coefficient of the compound semiconductor substrate 30, at 30°C to 300°C, αis linear expansion coefficient of the polycrystal ceramic substrate 10 and αis linear expansion coefficient of the compound semiconductor substrate 30, at 30°C to 1000°C.SELECTED DRAWING: Figure 1