SEMICONDUCTOR PHYSICAL QUANTITY SENSOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR PHYSICAL QUANTITY SENSOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor physical quantity sensor device that can be downsized and a method for manufacturing the semiconductor physical quantity sensor device.SOLUTION: When adjusting the output characteristic of a sensor cell 10, the trimming data stored in a shift register 2 is adjusted and stored in an EPROM 1. At this time, a second terminal 12 to which an operating voltage is applied and a plurality of light control circuits 5a-5e connected in parallel between the EPROM 1 and the shift register 2 are irradiated with light and cut off. Each of the light control circuits 5a-5e generates input signals 6a-6e having a prescribed waveform and inputs the generated signals to the EPROM 1 and the shift register 2. Therefore, the sensor cell 10 can dispense with an external terminal installed for adjusting the output characteristic of the sensor cell 10, and is provided with only three terminals 11-13 as external terminals. When using a product in which trimming is performed using the trimming data stored in the EPROM 1, the light control circuits 5a-5e are in a light shutoff state and do not operate.SELECTED DRAWING: Figure 1