PROBING MECHANISM, PROBE UNIT, AND SUBSTRATE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To enable a probe unit to easily attached and removed.;SOLUTION: A probe unit of the present invention includes an insertion part 40 inserted between a nut 14b secured to a bolt 14a erected on the base 12a of a probe unit 2 and the base 12a. The insertion part 40 includes bases 41b, 41c formed for the probe unit 2 to be facially contacted and provided with notches 48, 49 through which the shaft of the bolt 14a can be inserted, as well as a lift plate 42 and a coil spring 44 disposed between the base 41b and the plate 42. Due to that the bases 41b, 41c and the plate 42 are urged to separate from each other by the coil spring 44 while the shaft of the bolt 14a is inserted through the notches 48, 49 and the insertion part 40 is inserted between the nut 14b and the base 12a, the base 12a is pressed against the base 41b, and the plate 42 is also pressed against the nut 14b, whereby the probe unit 2 is attached to a probing mechanism 3.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT