PROBE UNIT, PROBE PIN MECHANISM, AND SUBSTRATE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a probe unit that can be accurately and easily attached to a probing mechanism.SOLUTION: The probe unit comprises a probe pin 11 and a support part 12 for supporting the probe pin 11, the support part 12 being provided with a unit-side fitting part for attachment to a probing mechanism 3, and an elastic deformation part 12b that permits the direct-acting or approximated direct-acting of the probe pin 11 in a direction opposite the direction of the probe pin by the probing mechanism 3. The unit-side fitting part is provided with a base part 12a provided in such a way that a reference plane F2 brought into facial contact with a mechanism-side reference plane provided in the probing mechanism 3 intersects the direction of the probing by the probing mechanism 3, and a bolt 14a erected in the reference plane F2, and is constructed so as to be attachable to the probing mechanism 3 by bringing the head of the bolt 14a closer to the reference plane F2 and inserting a held part 40 of the probing mechanism 3 between the head and the reference plane F2.SELECTED DRAWING: Figure 1