Probe unit, probing mechanism and substrate inspection device

摘要

PROBLEM TO BE SOLVED: To enable accurate and easy attachment to a probing mechanism.SOLUTION: A support part 12 is provided with a unit-side attachment part for attachment to a probing mechanism, and an elastic deformation part 12b for permitting the linear motion or approximate linear position of a probe pin 11 by the probing mechanism in a direction opposite the direction of the probe pin. The unit-side attachment part is provided in such a way that a reference plane F2 brought into facial contact with the mechanism-side reference plane of the probing mechanism interests the direction of the probing, and includes a base part 12a having provided on the reference plane F2 an insertion hole 21a (width narrow part 21a2) the open width of which is narrower than the diameter of a head part 62b in the rod 62 of the probing mechanism and wider than the diameter of the shaft part 62a of the rod 62, with the head part 62b brought closer to the mechanism-side reference plane and the open edge part of the insertion hole 21a caught in between the head part 62b and the mechanism-side reference plane, whereby attachment to the probing mechanism is made possible.SELECTED DRAWING: Figure 7