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COATED FILM UNEVENNESS DETECTION DEVICE AND COATED FILM UNEVENNESS DETECTION METHOD
COATED FILM UNEVENNESS DETECTION DEVICE AND COATED FILM UNEVENNESS DETECTION METHOD
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机译:涂膜不均匀度检测装置及涂膜不均匀度检测方法
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摘要
PROBLEM TO BE SOLVED: To provide an unevenness detection device and an unevenness detection device capable of performing image detection for unevenness occurring in a coated film drying step when a coating liquid such as ink and a polymer resin solution is applied to a substrate.;SOLUTION: A coated film unevenness detection device 30 for optically detecting unevenness occurring in a coating liquid applied onto a substrate 3 includes: means for forming a liner or curved uneven shape in parallel with each other at equal intervals onto a coating liquid applied onto a substrate; a light source 1 for irradiating light from a direction orthogonal to the uneven shape on the substrate to obtain reflected light; and an image detector 8 provided above the substrate for receiving the reflected light from the uneven shape and performing imaging.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT
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