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SENSOR CHIP PACKAGE, SENSOR CHIP PACKAGE ARRAY, GAS DETECTOR, AND GAS DETECTING METHOD
SENSOR CHIP PACKAGE, SENSOR CHIP PACKAGE ARRAY, GAS DETECTOR, AND GAS DETECTING METHOD
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机译:传感器芯片包装,传感器芯片包装阵列,气体检测仪和气体检测方法
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摘要
PROBLEM TO BE SOLVED: To provide a sensor chip package that is small in size, can easily calibrate a sensor chip, and can precisely measure a target gas.;SOLUTION: A sensor chip package 103 according to the present invention includes: a chip storage cell 12 for storing a sensor chip 10; and a first calibration gas storage cell 14, storing a first calibration gas and capable of being communicated with the chip storage cell.;SELECTED DRAWING: Figure 7;COPYRIGHT: (C)2017,JPO&INPIT
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