Substrate spreading device for vacuum processing apparatus, vacuum processing apparatus with substrate spreading device, and method of operating the same

摘要

A processing apparatus for processing a flexible substrate, in particular, a vacuum processing apparatus for processing a flexible substrate, is described. The processing apparatus includes a vacuum chamber, a processing drum within the vacuum chamber, the processing drum being configured to rotate about an axis extending in a first direction, a heating device adjacent the processing drum And a heating device configured to spread the substrate in a first direction or maintain the spread of the substrate in a first direction and wherein the dimension in a direction parallel to the substrate transfer direction is at least 20 mm .BACKGROUND OF THE INVENTION