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Image processing apparatus, pattern generation method using self-organized lithography technology, and computer program
Image processing apparatus, pattern generation method using self-organized lithography technology, and computer program
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机译:图像处理设备,使用自组织光刻技术的图案生成方法和计算机程序
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摘要
An image processor, a method for generating a pattern using self-organizing lithographic techniques, and a computer program are provided to achieve image processing suitable for addressing a sample generated by patterning using Directed Self-Assembly (DSA), and the processor, method, and computer program are characterized in that a template for addressing is prepared on the basis of guide pattern data used for patterning by DSA. The above configuration makes it possible to provide an addressing pattern suitable for visual field positioning in measuring or inspecting a pattern formed through the patterning process using DSA.
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