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Use of topography to induce organization of block copolymers in Graho epitaxial applications
Use of topography to induce organization of block copolymers in Graho epitaxial applications
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机译:在Graho外延应用中利用形貌诱导嵌段共聚物的组织
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摘要
A method is provided for forming a patterned topography on a substrate. The substrate is provided with features formed atop that constitute an existing topography, and a template for directed self-assembly (DSA) surrounds the exposed topography. Further to the method, the template is filled with a block copolymer (BCP) to cover the exposed topography, and then the BCP is annealed within the template to drive self-assembly in alignment with the topography. Developing the annealed BCP exposes a DSA pattern immediately overlying the topography.
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