首页> 外国专利> Evaporation source for organic material, apparatus having an evaporation source for organic material, system having an evaporation deposition apparatus including an evaporation source for organic material, and method for operating an evaporation source for organic material

Evaporation source for organic material, apparatus having an evaporation source for organic material, system having an evaporation deposition apparatus including an evaporation source for organic material, and method for operating an evaporation source for organic material

机译:用于有机材料的蒸发源,具有用于有机材料的蒸发源的设备,具有包括用于有机材料的蒸发源的蒸发沉积设备的系统以及用于操作用于有机材料的蒸发源的方法

摘要

An evaporation source for organic materials is described. The evaporation source is an evaporation crucible configured to evaporate the organic material; a distribution pipe having one or more outlets in fluid communication with the evaporation crucible and rotatable about the axis during evaporation; A support for a distribution pipe that is connectable to or includes a first driver, wherein the first driver is configured for translational movement of the support and the distribution pipe; Including. [Selection] Figure 2
机译:描述了用于有机材料的蒸发源。蒸发源是被配置为蒸发有机材料的蒸发坩埚。一种分配管,其具有一个或多个与蒸发坩埚流体连通的出口,并且在蒸发期间可绕着轴线旋转;分配管的支撑件,该支撑件可连接至第一驱动器或包括第一驱动器,其中第一驱动器配置成用于支撑件和分配管的平移运动;包含。 [选择]图2

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