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Scattered light information processing method, scattered light information processing apparatus and scattered light information processing system
Scattered light information processing method, scattered light information processing apparatus and scattered light information processing system
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机译:散射光信息处理方法,散射光信息处理装置和散射光信息处理系统
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摘要
This scattered-light-information processing method includes the following steps: a scattered-light-measurement-information acquisition step in which information regarding the intensity distribution of scattered light resulting from the scattering of light shone at a prescribed angle is acquired; a model generation step (step S202) in which a target-object model is generated from the geometry and optical properties of a target object, namely a transmissive optical element (300), and conditions under which the intensity distribution of the aforementioned scattered light was measured; a function-parameter setting step (step S203) in which, in the target-object model, a parameter for a function that represents information regarding output-side scattered light that has passed through the target object, at least, is set; a scattered-light-intensity-distribution computation step in which a scattered-light-intensity-distribution calculation result is computed on the basis of the target-object model; and function-parameter-computation processing steps (steps S204 through S207) in which the aforementioned function parameter is computed such that the scattered-light-intensity-distribution calculation result computed on the basis of the target-object model matches the scattered-light-intensity-distribution information acquired in the scattered-light-measurement-information acquisition step.
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