Scattered light information processing method, scattered light information processing apparatus and scattered light information processing system

摘要

DUT is an optical element 300 of the permeability, and scattered light measurement information acquisition step of acquiring information of the scattered light intensity distribution of irradiated light at a predetermined angle, the shape and optical properties of the object to be measured the measurement conditions of the scattered light intensity distribution, the model generation step of generating a measured object model (step S202), with respect to the measurement object model, the function representing the scattered light information on the exit side that transmits at least the measurement object function parameter setting step of setting the parameters (step S203), the scattered light intensity distribution calculating step of calculating the scattered light intensity distribution calculation result based on the measurement object model obtained in the scattered light measurement information acquisition step scattered light intensity and distribution of information, the function parameter calculating step of calculating the function parameters to the scattered light intensity distribution calculation result calculated based on the measurement object model, coincides (scan Having from-up S204 and step S207), the.